Advanced Energy has recently launched a new Digitally Controlled RF power supply named Alta. The Alta has been designed to provide a fully digital control and dynamic response to rapid plasma changes to ensure robust and reliable delivery. The comprehensive RF power delivery solution features an accurate digital impedance matching network. It also comes with features such as frequency tuning, real-time power and impedance measurement, arc management, phase synchronization, etc. For communication, it uses communication interfaces such as EtherCAT and Profinet.
According to the company, the Alta platform comes with a 13.56 MHz rack-mounted power supply with power levels from 1.5 kW to 6 kW and a 13.56 MHz tapped digital matching network. The module is developed and optimized for plasma-based industrial processes that require high accuracy, reliability, and repeatable precision power delivery.
“As thin-film manufacturing technologies evolve and rapid plasma transitions become the norm, there is a growing demand for power solutions that combine precise RF control with dynamic response to rapid plasma changes,” said Dhaval Dhayatkar, Senior Director of Marketing, Plasma Power at Advanced Energy. “The ALTA power supply offers several advanced features including frequency tuning, real-time power, and impedance measurement, tight power regulation, arc management, and phase synchronization.”
The company claims that the ALTA platform enables extremely precise process measurement and control due to the adoption of advanced digital architecture. Furthermore, it provides a seamless system integration with newer communication interfaces such as EtherCAT and Profinet. The Alta platform can be used in applications such as solar panels, flat panel displays, precision optics, and automotive glass manufacturing.