Wednesday, December 7, 2022

HHV Develops PECVD System For Thin Film Deposition

R. Giridhara Gopalan, vice president--solar equipment division, HHV elaborates on the company's PECVD system and how the tool can be used for R&D in MEMS/NEMS, photonics, solid state lighting areas, etc.

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Conducting layer: This layer is made of organic plastic molecules that transport “holes” from the anode. One conducting polymer used in OLEDs is polyaniline.

Emissive layer: This layer is made of organic plastic molecules (different ones from the conducting layer) that transport electrons from the cathode; this is where light is made. One polymer used in the emissive layer is polyfluorene.

Cathode (may or may not be transparent depending on the type of OLED): The cathode injects electrons when a current flows through the device.

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Organic Layer Deposition can be carried out using this tool.

Q. Did you get into any tech transfer arrangement to develop the PECVD system?
A. HHV has a very strong R&D programme in thin film technology and has built equipment for mass production of solar thin film modules. HHV has put up the first indigeneous thin film line in India and won the coveted Indian Semiconductor Association (ISA) award last year. As a sequel, we developed R&D tools for research in nano and solar areas.

Q. You have three customers in India. Who are they? Where else are you looking to sell your product?
A. We have sold to three educational institutes in India (two systems to BESU, Kolkata, and one system to RVCE, Bengaluru). We plan to sell this to various institutes carrying out research in solar and nano technology.

We are also targeting the international market.

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